LABORATORY OF PHYSICS OF INTERFACES AND THIN FILMS
Main Research Activities
Silicon based thin films and nanomaterials
Large area electronic applications
Carbone nanotubes and applications
Polarimetric instrumentation and applications
Overview
Staff : 56 persons including 26 permanents, 8 teachers at Ecole Polytechnique, 15 PhD and 3 Master students
Occupied area (inside Ecole polytechnique campus) : about 1000 m2
Budget : about 2 M� per year (including salaries) including 0.5 M of grants and industrial contracts
Know-How
Plasma synthesis of semiconductor thin films, amorphous, polymorphous or microcrystalline
silicon alloys dielectric films
monitoring and real time control of thin film growth by spectroellipsometry
cluster-surface interaction
Molecular dynamics simulations
Thin film photovoltaic devices
Thin film transistors for large area electronic applications
Carbon thin films and nanotubes synthesis
Development of spectroscopic ellipsometers and polarimeters
Applications of polarimetry
Methods and facilities
Plasma Enhanced Chemical Vapor Deposition (PECVD) based on radiofrequency discharges
PECVD using Distributed Electron Cyclotron Resonance
Hot Wire CVD
In situ spectroellipsometry analysis of PECVD
Spectroellipsometry from deep UV to infrared
Raman spectroscopy
Time Resolved Microwave Conductivity
Surface science instrumental set-up
Application area
Plasma processes
Solar cells
Large area electronic applications (AMLCD, OLED)
Photodetection
Thin film coatings
Instrumentation in optics
Optical metrology in microelectronics
Biomedical applications of polarimetry
Link:
www.lpicm.polytechnique.fr/jsp/accueil.jsp